(Tokyo Institute of Technology) Tokyo Institute of Technology President Kazuya Masu and NTT Advanced Technology Corporation succeed in the development of high-sensitivity and low-noise MEMS (1) accelerometer by using multi-layer metal structures that are composed of multiple metal layers. The developed accelerometer achieves 1 μG level resolution that has been a challenging task with conventional MEMS technology. (G: gravitational acceleration, G = 9.8 m/s2) The proposed technology is an innovative solution to increase the resolution of miniaturized accelerometers for general purpose use.
from EurekAlert! - Technology, Engineering and Computer Science https://ift.tt/32UIMtI
Monday, July 22, 2019
Succeed in sensitivity increase and noise reduction of accelerometer
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